Work

Micromachining of fine ceramics by photolithography

Year: 1999

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(98)00353-7

Authors: Eiji Makino, Takayuki Shibata, Yoshihiko Yamada

Institution: Hokkaido University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006475959

FWCI: 0.443

Cites: 18

Cited by: 18

Related to: 10