The role of silicon self-interstitial supersaturation in the retardation of oxygen precipitation in Czochralski silicon
Year: 1989
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.343303
Institutions: Duke University, North Carolina State University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Duke Endowment
OpenAlex ID: W2006557953