RF-power-controlled young's modulus of plasma-polymerized organosilicon films
Year: 2005
Type: article
Source: Journal of Materials Science
Authors: V. Cech, J. Vanek, A. A. Goruppa, F. R. Jones
Institutions: Brno University of Technology, University of Sheffield
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006856121