Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy
Year: 2003
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.1555693
Institution: University of California, Berkeley
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006935216