Work

Quality control during excimer laser material processing

Year: 1993

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.144562

Authors: Manfred Geiger, Norbert Lutz, Thomas Rebhan, Joachim Hutfless

Institution: Friedrich-Alexander-Universität Erlangen-Nürnberg

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2008580572

FWCI: 1.661

Cites:

Cited by: 2

Related to: 10