Work

Torsional MEMS scanner design for high-resolution scanning display systems

Year: 2002

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.469198

Author: Hakan Urey

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2008934722

FWCI: 3.561

Cites:

Cited by: 120

Related to: 10