Work

High-Frequency AlN-on-Silicon Resonant Square Gyroscopes

Year: 2013

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2013.2273031

Authors: Roozbeh Tabrizian, Mojtaba Hodjat-Shamami, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2009143807

FWCI: 2.8

Cites: 9

Cited by: 43

Related to: 10