X-ray imaging during plasma-source ion implantation
Year: 1996
Type: article
DOI: 10.1007/bf01465221
Authors: M. Piper, J. L. Shohet, J. H. Booske, K. H. Chew, L. Zhang, P. Sandstrom, J. Jacobs
Institution: University of Wisconsin–Madison
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2009219869