Work

An industrial CMOS process family adapted for the fabrication of smart silicon sensors

Year: 2000

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(99)00348-9

Authors: T Müller, M Brandl, O Brand, H Baltes

Institutions: ETH Zurich, AMS (Austria)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2010737519

FWCI: 4.544

Cites: 19

Cited by: 52

Related to: 10