Work

Invited talk 1: Integrative MEMS/NEMS technology for micro and nano systems

Year: 2008

Type: conference-abstract

Source: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

DOI: 10.1109/dtip.2008.4752939

Author: Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2010980221

Cites:

Cited by: 1

Related to: 10