Manufacturing of microstructures with high aspect ratio by micromachining
Work
Year: 2008
Type: article
Source: Microsystem Technologies
Authors T. Gietzelt, L. Eichhorn, K. R. Schubert
Cites:
Cited by: 15
Related to: 10
FWCI: 0.518
Citation percentile (by year/subfield): 80.14
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed