Work

Copper CMP Mimicked With Atomic Force Microscopy

Year: 2005

Type: conference-paper

Source: World Tribology Congress (WTC)

DOI: 10.1115/wtc2005-64018

Author: Igor Sokolov

Institution: Clarkson University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2011435181

FWCI:

Cites:

Cited by:

Related to: 10