A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range
Year: 1990
Type: article
DOI: 10.1109/58.105249
Authors: J.W. Judy, D.L. Polla, W.P. Robbins
Institution: University of Minnesota
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2011794827