Work

On the role of self-interstitials in impurity diffusion in silicon

Year: 1980

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.327540

Author: R. B. Fair

Institution: AT&T (United States)

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2011985488

FWCI: 3.409

Cites: 22

Cited by: 31

Related to: 10