Work

Micromachined silicon and polymer probes integrated with film-bulk-acoustic-resonator mass sensors

Year: 2010

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/20/12/125008

Authors: Hao Zhang, Wei Pang, Eun Sok Kim, Hongyu Yu

Institutions: Tianjin University, University of Southern California, Arizona State University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Office of Naval Research

OpenAlex ID: W2012096439

FWCI: 0.728

Cites: 26

Cited by: 7

Related to: 10