Work

Where Is The Lost Resolution?

Year: 1986

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.963701

Author: Burn J. Lin

Institution: IBM (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012124880

FWCI:

Cites:

Cited by: 40

Related to: 10