Work

A LOCOS process for an electrostatic microfabricated motor

Year: 1990

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/0924-4247(90)87054-m

Authors: Lee S. Tavrow, Stephen F. Bart, Jeffrey H. Lang, Martin F. Schlecht

Institution: Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: National Science Foundation, Charles Stark Draper Laboratory

OpenAlex ID: W2012202497

FWCI: 3.827

Cites: 14

Cited by: 21

Related to: 10