Work

CMOS-based microsensors and packaging

Year: 2001

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(01)00532-5

Authors: Henry Baltes, Oliver Brand

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Eidgenössische Technische Hochschule Zürich

OpenAlex ID: W2012376833

FWCI: 3.34

Cites: 35

Cited by: 67

Related to: 10