Work

Two-dimensional electromagnetic model of a microwave plasma reactor operated by an axial injection torch

Year: 2007

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.2732508

Authors: R. Álvarez, L. L. Alves

Institution: Instituto Superior Técnico

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012561461

FWCI: 2.139

Cites: 28

Cited by: 21

Related to: 10