Work

Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge mass spectrometry source

Year: 1998

Type: article

Source: Journal of Analytical Atomic Spectrometry

DOI: 10.1039/a803894e

Authors: Terri E. Gibeau, R. Kenneth Marcus

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Corning Incorporated Foundation, Division of Chemistry

OpenAlex ID: W2012860059

FWCI: 3.461

Cites: 27

Cited by: 21

Related to: 10