Sensitivity increase for coating thickness determination using THz waveguides
Year: 2010
Type: article
Abstract: We report on layer thickness determination down to a thickness of 2.5 microns using terahertz waveguide spectroscopy. Compared to typical single-pass transmission measurements in the time domain, the effective THz pulse delay is considerably increased for a given layer thickness by using the high filling factor of the THz waveguide. This corresponds to a sensitivity increase up to a factor of 50 for the measured delay, allowing the direct measurement of layer thicknesses down to below hundredths of a THz wavelength.
Source: Optics Express
DOI: 10.1364/oe.18.011456
Authors: M. Theuer, R. Beigang, D. Grischkowsky
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
Funder: National Science Foundation
OpenAlex ID: W2013195116
