Work

A novel ellipsometer for measuring thickness of oxide layer on the surface of silicon sphere

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.756865

Authors: Jitao Zhang, Yan Li

Institution: Tsinghua University

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013834238

FWCI: 0.766

Cites:

Cited by: 1

Related to: 10