A wireless batch sealed absolute capacitive pressure sensor
Year: 2001
Type: article
Source: Sensors and Actuators A Physical
Authors: Orhan Akar, Tayfun Akin, Khalil Najafi
Institutions: Middle East Technical University, University of Michigan
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: National Science Foundation
OpenAlex ID: W2013896105