Work

Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser

Year: 2013

Type: article

Source: Optics Communications

DOI: 10.1016/j.optcom.2013.03.055

Authors: Jungjae Park, Jonghan Jin, Jae Wan Kim, Jong-Ahn Kim

Institutions: Korea Research Institute of Standards and Science, Korea University of Science and Technology

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funder: Korea Research Institute of Standards and Science

Award: G3833085222

OpenAlex ID: W2013955378

FWCI: 4.214

Cites: 9

Cited by: 43

Related to: 10