Work

Off-The-Shelf MEMS for rotary MEMS

Year: 2012

Type: conference-paper

Source: Proceedings, IEEE micro electro mechanical systems

DOI: 10.1109/memsys.2012.6170241

Authors: B. Hanrahan, J. Feldman, S. Misra, C. M. Waits, P. D. Mitcheson, R. Ghodssi

Institutions: DEVCOM Army Research Laboratory, University of Maryland, College Park, Imperial College London

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Army Research Laboratory

OpenAlex ID: W2014461882

FWCI: 1.226

Cites: 7

Cited by: 4

Related to: 10