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Modeling Atom Probe Tomography: A review

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Year: 2014
Type: article
Source: Ultramicroscopy
DOI: 10.1016/j.ultramic.2014.12.013
Authors: F. Vurpillot, C. Oberdorfer
Institutions: Centre National de la Recherche Scientifique, Groupe de Physique des Matériaux, Université de Rouen Normandie, University of Stuttgart
Language: English

Topic: Advanced Materials Characterization Techniques
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funder: Agence Nationale de la Recherche
Award: Atom Probe Tomograpy of 3-D nanoelectronic devices: Innovative meThods in reconstrUction and quantitative analysis DEvelopment.
OpenAlex ID: W2014803818
FWCI: 2.813
Cites: 56
Cited by: 90
Related to: 10
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