Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference reactor
Year: 2005
Type: article
DOI: 10.1116/1.2049309
Authors: Baosuo Zhou, Eric A. Joseph, Sanket P. Sant, Yonghua Liu, Arun Radhakrishnan, Lawrence J. Overzet, Matthew J. Goeckner
Institution: The University of Texas at Dallas
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015392473