Spline regression based feature extraction for semiconductor process fault detection using support vector machine
Year: 2010
Type: article
Source: Expert Systems with Applications
Authors: Jonghyuck Park, Ick-Hyun Kwon, Sung-Shick Kim, Jun-Geol Baek
Institutions: Korea University, Inje University
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G6595888765, G8356520399
OpenAlex ID: W2016211854