Preparation of Multi-Layered Tungsten-Carbon Films by Ion-Beam Sputtering
Year: 1985
Type: article
DOI: 10.1143/jjap.24.1366
Authors: Koji Takei, Yasushi Maeda
Institution: NTT (Japan)
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2016570944
