Work

Hermetically encapsulated differential resonant accelerometer

Year: 2013

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2013.6626839

Authors: D. L. Christensen, C. H. Ahn, V. A. Hong, E. J. Ng, Y. Yang, B. J. Lee, T. W. Kenny

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016946512

FWCI: 1.218

Cites: 9

Cited by: 16

Related to: 10