Work

Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulse

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2003503

Authors: Anas Fauzi, Sung-Jin Kim, Jong-Rae Jung, Seok-Hee Jeon, Nam Kim

Institutions: Chungbuk National University, Suwon Science College, Incheon National University

Language: English

Topic: Advanced Optical Imaging Technologies

Subfield: Media Technology

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017541345

FWCI:

Cites:

Cited by: 2

Related to: 10