Work

Large step structure measurement by using white light interferometry based on adaptive scanning

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2014754

Authors: Yan Bian, Tong Guo, Feng Li, Siming Wang, Xing Fu, Xiaotang Hu

Institutions: Tianjin University of Technology and Education, Tianjin University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017599886

FWCI:

Cites:

Cited by: 3

Related to: 10