Microstructure of SiC deposited from methyltrichlorosilane
Work
Year: 2003
Type: article
Institution Karlsruhe Institute of Technology
Cites: 29
Cited by: 44
Related to: 10
FWCI: 0.296
Citation percentile (by year/subfield): 87.78
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed