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Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source

Year: 2011
Type: article
Abstract: New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40 nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13 nm high harmonic beams, we demonstrate a record 22 nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures.
DOI: 10.1364/oe.19.022470
Authors: Matthew D. Seaberg, Daniel E. Adams, Ethan L. Townsend, Daisy A. Raymondson, William F. Schlotter, Yanwei Liu, Carmen S. Menoni, Lu Rong, Chien-Chun Chen, Jianwei Miao, Henry C. Kapteyn, Margaret M. Murnane
Institutions: Joint Institute for Laboratory Astrophysics, University of Colorado Boulder, SLAC National Accelerator Laboratory, University of California, Berkeley, Colorado State University, California NanoSystems Institute, University of California, Los Angeles
Language: English
Subfield: Radiation
Open Access status: gold
Estimated APC paid: $2,270
OpenAlex ID: W2017808912
FWCI: 18.8
Cites: 45
Cited by: 159
Related to: 10