The role of the casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS)
Year: 1998
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.368410
Institution: University of Illinois Chicago
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2018254400