Work

Effect of thickness anisotropy on degenerate modes in oxide micro-hemispherical shell resonators

Year: 2013

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2013.6474204

Authors: L. D. Sorenson, P. Shao, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Northrop Grumman, Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2018635296

FWCI: 9.909

Cites: 8

Cited by: 20

Related to: 10