Work

Physical and chemical characterization of barium strontium titanate thin films

Year: 1998

Type: conference-paper

Source: International Conference on Characterization and Metrology for ULSI Technology

DOI: 10.1063/1.56807

Authors: Thomas Remmel, Wei Chen, Ran Liu, Mike Kottke, Richard Gregory, Peter Fejes, Beth Baumert, Peir Chu

Institution: Motorola (United States)

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Division of Materials Research

OpenAlex ID: W2018999348

FWCI: 1.804

Cites:

Cited by: 1

Related to: 10