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Thermodynamical analysis of polytype stability during PVT growth of SiC using 2D nucleation theory

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Year: 2012
Type: article
Source: Journal of Crystal Growth
DOI: 10.1016/j.jcrysgro.2012.01.023
Authors: T. Shiramomo, B. Gao, F. Mercier, S. Nishizawa, S. Nakano, Y. Kangawa, K. Kakimoto
Institutions: Kyushu University, Research Institute for Applied Mechanics, Kyushu University, National Institute of Advanced Industrial Science and Technology
Language: English

Topic: Silicon Carbide Semiconductor Technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funder: Japan Society for the Promotion of Science
Award: Development of macro-nano combined growth method for energy saving
OpenAlex ID: W2019184221
FWCI: 1.227
Cites: 19
Cited by: 27
Related to: 10
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