Broadband antireflection gratings fabricated upon silicon substrates
Year: 1999
Type: article
Source: Optics Letters
DOI: 10.1364/ol.24.001422
Authors: Y. Kanamori, M. Sasaki, K. Hane
Institution: Tohoku University
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2019290169