Work

In-Situ Study Of Silicon Vapour Phase Epitaxy Using Laser Light Scattering

Year: 1989

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.949324

Authors: D. J. Robbins, A. J. Pidduck, C. Pickering, I. M. Young, J. L. Glasper

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2019476995

FWCI: 0.565

Cites:

Cited by: 8

Related to: 10