Work

Electrostatic-Pneumatic Membrane Mirror With Positive or Negative Variable Optical Power

Year: 2014

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2014.2346758

Authors: Mohammad J. Moghimi, David L. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Montana State University, Montana Board of Research and Commercialization Technology

Awards: STTR Phase II: Compact Aberration Compensated Focus and Scan Control for Biomedical Sensors, G3313551727, IDBR: Bridging Electronic Focus and Aberration Control for Scanning Laser Microscopes from Lab to Commercial Readiness, MRI: Development of an Active/Adaptive Scanning Laser Microscope

OpenAlex ID: W2019854663

FWCI: 1.77

Cites: 46

Cited by: 22

Related to: 10