OpenAlex | Diffusion Processes in Semiconductor Structures During Microwave Annealing

Diffusion Processes in Semiconductor Structures During Microwave Annealing

Work

Year: 2003

Type: article

Source: Radiophysics and Quantum Electronics

Authors Yu. V. Bykov, A. G. Eremeev, N. A. Zharova, I. V. Plotnikov, K. I. Rybakov +3 more

Institutions Russian Academy of Sciences, Institute for Physics of Microstructures

Cites: 7

Cited by: 71

Related to: 10

FWCI:

Citation percentile (by year/subfield): 80.58

Topic: Microwave-Assisted Synthesis and Applications

Subfield: Organic Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed