Work

Fabrication of dome-shaped diaphragm with circular clamped boundary on silicon substrate

Year: 1999

Type: conference-paper

DOI: 10.1109/memsys.1999.746880

Authors: Cheol-Hyun Han, Eun Sok Kim

Institution: University of Hawaiʻi at Mānoa

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2020069084

FWCI: 3.876

Cites: 10

Cited by: 29

Related to: 10