Properties of TiN hard coatings prepared by unbalanced magnetron sputtering and cathodic arc deposition using a uni- and bipolar pulsed bias voltage
Year: 1995
Type: article
Source: Surface and Coatings Technology
Authors: M. Griepentrog, B. Mackrodt, G. Mark, T. Linz
Institution: Federal Institute For Materials Research and Testing
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2020227747