Tunable optical filters for in-plane integration on InP MEMS platform
Year: 2005
Type: conference-paper
DOI: 10.1117/12.608530
Authors: M. Datta, J. McGee, M. W. Pruessner, K. Amarnath, S. Kanakaraju, R. Ghodssi
Institution: University of Maryland, College Park
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2020563982