Structure of pyrolytic and sputtered SiO2 films by X-ray Fourier analysis
Year: 1970
Type: article
Source: physica status solidi (a)
Authors: S. C. H. Lin, M. Joshi
Institution: IBM (United States)
Language: English
Subfield: Ceramics and Composites
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2020792223
