Work

Structure of pyrolytic and sputtered SiO2 films by X-ray Fourier analysis

Year: 1970
Type: article
Authors: S. C. H. Lin, M. Joshi
Institution: IBM (United States)
Language: English
Open Access status: closed
OpenAlex ID: W2020792223
FWCI: 1.169
Cites: 12
Cited by: 6
Related to: 10