Work

Characterization of structures fabricated by atomic force microscope lithography

Year: 1999

Type: article

Source: Surface Science

DOI: 10.1016/s0039-6028(99)00552-x

Authors: Elain S. Fu, Xue-sen Wang, Ellen D. Williams

Institution: University of Maryland, College Park

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2021680432

FWCI:

Cites: 42

Cited by: 4

Related to: 10