Work

A reduced-order model for electrically actuated microbeam-based MEMS

Year: 2003

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2003.818069

Authors: M.I. Younis, E.M. Abdel-Rahman, A. Nayfeh

Institution: Virginia Tech

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2022344696

FWCI: 20.24

Cites: 15

Cited by: 592

Related to: 8