Microstructuring of silicon with femtosecond laser pulses
Year: 1998
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.122241
Authors: Tsing-Hua Her, Richard J. Finlay, Claudia Wu, Shrenik Deliwala, Eric Mazur
Institution: Harvard University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2022375783