Trace Gas Sensor Based on MEMS Cantilever Resonator
Year: 2011
Type: article
Source: Advanced materials research
Authors: Ying Dong, Wei Gao, Zheng You
Institution: Tsinghua University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2022683087